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Defects in High-k Gate Dielectric Stacks

Defects in High-k Gate Dielectric Stacks
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SEMATECH Researchers to Unveil Next-Generation Device and Process ... SEMATECH Researchers to Unveil Next-Generation Device and Process ... Nov 30, 2009 09:22:14
SEMATECH experts will report on low defect density high-k gate stacks for alternative III-V channel materials and non-planar devices, and discuss a new dry ...

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